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Method of forming a field emission device with integrally formed electrostatic lens

机译:具有一体形成的静电透镜的场致发射器件的形成方法

摘要

A FED including an integrally formed electrostatic lens (37) with an aperture having a diameter which is dissimilar from an aperture of the FED gate (31) to effect a reduction in electron beam cross-section. By forming the FED with an electrostatic lens aperture of increased diameter relative to the diameter of the gate aperture a reduced sensitivity with respect to lens thickness and location is realized as is a relaxation of electrostatic lens fabrication constraints. Image display devices employing such integrally formed electrostatic lens systems may be provided wherein pixel cross-sections as small as two microns are realized.
机译:FED包括一体形成的静电透镜(37),该静电透镜的孔径与FED栅极(31)的孔径不同,以减小电子束的横截面。通过形成具有相对于栅极孔的直径增加的直径的静电透镜孔的FED,实现了相对于透镜厚度和位置的减小的灵敏度,这是对静电透镜制造约束的放松。可以提供采用这种整体形成的静电透镜系统的图像显示装置,其中实现了小至两个微米的像素横截面。

著录项

  • 公开/公告号EP0545621B1

    专利类型

  • 公开/公告日1995-09-06

    原文格式PDF

  • 申请/专利权人 MOTOROLA INC;

    申请/专利号EP19920310779

  • 发明设计人 KANE ROBERT C.;PARKER NORMAN W.;

    申请日1992-11-25

  • 分类号H01J3/02;H01J1/30;

  • 国家 EP

  • 入库时间 2022-08-22 04:13:35

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