Universal cold cathode ion generation and acceleration device.

摘要

The device comprises an ionizing unit for the production of low-energy (100-1000 eV) ions (fig. 2a) with a second negative medium voltage (-100 - 1000 V) grid (6 min ) cathode (6), a second also grid (13 min ) and low-voltage (0 + 100 V) anode (13) and a third medium voltage (-100 - 1000 V) accelerating cathode (12, 12 min ), to extract the ions from the unit of three grids (6 min , 13 min ,12 min ). For the production of high-energy (from 10 to beyond 200 keV) ions (fig. 3a) there are provided in succession starting from target (2): a first low-voltage (0 -100 V) anode (7 min , 7 sec ), a second low-voltage (0 + 50 V) grid (13 sec sec ) anode (13), the second anode which cooperates to form with its central opening (13 sec ) an acceleration lens of the ion beam, a second medium negative voltage (-500 -3000 V) grid (6 sec ) accelerating cathode (6) and a third accelerating cathode (12, 12 sec ) which, with its central opening 12 sec , completes the acceleration lenses, the entire unit so as to direct the ion beam toward the bottom or in the desired direction.