Semiconductors - a gas sensor on the basis of a capacitively controlled field effect transistor (capacitive controlled field effect transistor, ccfet)

摘要

A semiconductor gas sensor, consisting of a field-effect transistor, the control and reference electrodes of which are lengthened and coupled to a capacitor arrangement which contains an air gap, is described. A gas-sensitive layer is arranged in the air gap. The transistor and the air gap are spatially separated from each other. It is possible to take gas measurements without gas diffusion through the gate electrode via the air gap and, by virtue of the separation of the air gap and the transistor, negative influences of the air gap on the drift behaviour and the lifetime of the sensor are eliminated. A monolithically integratable (monolithic integrated) and a hybrid design of the sensor are presented as exemplary embodiments.