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Method of measuring amount of organic material adsorbed to surface of semiconductor substrate
Method of measuring amount of organic material adsorbed to surface of semiconductor substrate
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机译:测量吸附到半导体衬底表面的有机材料的量的方法
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摘要
A method of measuring the amount of organic material adhered to the surface of a semiconductor substrate. In the method, a metal is precipitated by bringing the reaction solution into contact with organic material on the surface of semiconductor substrate. The amount of the organic material adhered to the semiconductor substrate can be determined by detecting the amount of the metal precipitated.
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