Multilayer membrane refractor null for x-ray vacuum ultraviolet ray

摘要

PURPOSE:To enhance the reflectivity of a specular surface by specifying the surface roughness values of the boundary face in multi-layered structure and the surface of a reflecting mirror by rms values at the time of observing the section. CONSTITUTION:Layers 2, 4 of a 1st material and layers 3, 5 of a 2nd material which are different in refractive index from each other are alternately laminated on the base plate 1. The surface roughness values of the boundary faces in the mutli-layered structure and the surface of the reflecting mirror are specified to =1/8 the wavelength to be used by the rms value at the time of observing the section of a sample having =100Angstrom and =700Angstrom thickness by a transmission electron microscope. The reflectivity of the specular surface is thereby increased from several times to 10 times.