Multilayer membrane refractor null for x-ray or vacuum ultraviolet ray

摘要

PURPOSE:To obtain a multilayered film reflection mirror which is superior in heat resistance and is free from blur between layers, by using high-melting point compounds as constituting materials of layers to form alternate layers. CONSTITUTION:Layers 2, 4, 6... consisting of a first material and layers 3, 5, 7... consisting of a second material are alternately laminated on a substrate 1. The material having a high refractive index to the light in the area of X rays and vacuum ultraviolet rays and the material having a low refractive index to it are used to form alternate layers for the purpose of giving a difference of refractive index between respective layers of alternate layers, and a boride, a nitride, a carbide, or an oxide of a transition metal is used as the material having a low refractive index and a high melting point, and a nitride, carbide, or an oxide of beryllium, aluminum, boron, or silicon is used as the material having a high refractive index and a high melting point. Thus, not only a high reflection factor is obtained even for the light in the area of soft X rays and vacuum ultraviolet rays is obtained but also the durability of sufficient long time is obtained even for irradiation of conventional synchrotron orbital radiation or the like.