Creation manner null of multilayer film refractor for x-ray or vacuum ultraviolet ray

摘要

PURPOSE:To obtain a multi-layer reflecting mirror or an X ray and a vacuum ultraviolet ray with a high reflectivity and also excellent thermal resistance and chemical stability, by forming a layer membrane of at least one kind of the two with a crystallized substance. CONSTITUTION:Layered membranes of a multi-layered reflecting mirror consist of a specific and crystallized single element or of a crystallized compound so as to keep a performance as a reflecting mirror even though it is irradiated and locally heated by an irradiation of a highly intensive ray such as synchrotron orbital radiation ray. As these layer membranes consisting of specific materials, a layer membrane containing one kind of more of metallic elements of the platinum group such as a ruthenium, Ru and so on, is much preferable. As other layer membranes laminated alternatively with the membrane, a combination of a layer membrane consisting of one or more kinds of a beryllium, Be or a boron, B and so on as an amorphous layer membrane or, more preferably, as a crystallized membrane, with the previous layer membrane, is much more preferable. Such a reflecting mirror having this kind of constitution has an enough durability against a long term continuous irradiation.