Multilayer film refractor null for x-ray vacuum ultraviolet ray

摘要

PURPOSE:To enhance the reflectivity of a specular surface by specifying the respective surface roughness values of the surface of a base plate and the surface of a reflecting mirror by a heterodyne interference type surface roughness meter and specifying the respective surface roughness values of the base plate surface, the respective boundary faces and the surface of the reflecting mirror by the rms value at the time of observing the section. CONSTITUTION:Layers 2, 4 of a 1st material and layers 3, 5 of a 2nd material which are different in refractive index from each other are alternately laminated on the base plate 1. The surface roughness values of the surface of the base plate 1 and the surface of the reflecting mirror are both reduced to =1/16 the wavelength to be used by the rms value of the heterodyne interference type surface roughness meter. The respective surface roughness values of the base plate surface, the boundary faces of the multi-layered structure and the surface of the reflecting mirror are specified to =1/8 the wavelength to be used by the rms value at the time of observing the section of a sample having =100Angstrom and =700Angstrom thickness by a transmission electron microscope. The reflectivity of the specular surface is thereby increased from several times to 10 times.