PURPOSE: To set a wafer cassette relatively easily without causing positional shift of wafers using a simple and compact apparatus. ;CONSTITUTION: A movable member 12 having a rear positioning part 2 to be engaged with the rear part of a wafer cassette 4 is fixed onto a base 1 on the rear end side thereof such that the member 12 can incline through a shaft 11. A front positioning part 3 is fixed to the base 1 on the front end side thereof. The movable member 12 inclines such that the rear part sinks and the front part floats when the wafer cassette 4 is not mounted. The wafer cassette 4 is set by floating the wafer cassette 4 on the front side according to the inclination of the movable member 12, engaging the rear end of the wafer cassette 4 with the rear positioning part 2, turning the front side of the wafer cassette 4 downward about the shaft 11 and engaging the front side of the wafer cassette 4 with the front positioning part 3.;COPYRIGHT: (C)1996,JPO
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