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CHEMICAL VAPOR DEPOSITION METHOD OF GROWING OXIDE CHEMICAL VAPOR DEPOSITION METHOD OF GROWING OXIDE FILMS WITH GIANT MAGNETORESISTANCE FILMS WITH GIANT MAGNETORESISTANCE
CHEMICAL VAPOR DEPOSITION METHOD OF GROWING OXIDE CHEMICAL VAPOR DEPOSITION METHOD OF GROWING OXIDE FILMS WITH GIANT MAGNETORESISTANCE FILMS WITH GIANT MAGNETORESISTANCE
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机译:氧化物生长的化学气相沉积方法巨大的磁致电阻的氧化物生长薄膜的化学气相沉积方法
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摘要
A chemical vapor deposition method for forming films or coatings of metal oxide films showing a giant magnetoresistive effect, with the metal oxides having the formula LaxA1-xMnO3 wherein A is selected from the group consisting of barium, calcium, manganese, and strontium, and x is a number in the range of from 0.2 to 0.4. The method uses a liquid source delivery CVD approach, wherein source reagent solution precursor is flash vaporized and is delivered to a CVD chamber (100), wherein it decomposes to deposit the multicomponent metal oxide films with well-controlled stoichiometry.
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