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CHEMICAL VAPOR DEPOSITION METHOD OF GROWING OXIDE FILMS WITH GIANT MAGNETORESISTANCE
CHEMICAL VAPOR DEPOSITION METHOD OF GROWING OXIDE FILMS WITH GIANT MAGNETORESISTANCE
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机译:巨大磁阻的生长氧化膜的化学气相沉积方法
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摘要
A chemical vapor deposition method for forming films or coatings of metal oxide films showing a giant magnetoresistive effect, with the metal oxides having the formula LaxA1-xMnO3 wherein A is selected from the group consisting of barium, calcium, manganese, and strontium, and x is a number in the range of from 0.2 to 0.4. The method uses a liquid source delivery CVD approach, wherein source reagent solution precursor is flash vaporized and is delivered to a CVD chamber (100), wherein it decomposes to deposit the multicomponent metal oxide films with well-controlled stoichiometry.
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