首页>
外国专利>
Method for producing ultrathin metal film and ultrathin-thin metal pattern
Method for producing ultrathin metal film and ultrathin-thin metal pattern
展开▼
机译:超薄金属膜的制造方法及超薄金属图案
展开▼
页面导航
摘要
著录项
相似文献
摘要
A responsive film containing a responsible group occuring a chemical reaction by energy beam is formed on an insulated substrate, and energy beam is irradiated in a pattern, and part of the responsive group is selectively deactivated or activated, and only the remaining portion of the responsive group of the responsive film is coupled with a chemical substance containing metal in a later process, and an ultrafine pattern of metal film is formed.
展开▼