首页> 外国专利> CARRIER ACCEPT TYPE STOCKER

CARRIER ACCEPT TYPE STOCKER

机译:承运人接受式滑板

摘要

PURPOSE:To prevent interference among different transportation systems and to provide a stocker capable of satisfying needs of every user, by providing a stocker body with a plurality of supplying and discharging ports, and providing a cylindrical stock shelf rotatably in a rectangular frame. CONSTITUTION:A stocker body 1 is constructed by mounting a cylindrical stocking shelf 4 rotatably in a rectangular frame 3. The body is constructed in a unit fashion such that a handler mechanism 5 for introducing and discharging wafers can be attached to any desired face of the body 1. The stocking shelf 4 is constituted by a multiplicity of disk-type plates 4a having an aperture 6 at the center thereof and arranged one over another so that they are shaped into a cylinder as a whole. An introducing and discharging port 2a is utilized for transportation between processes, a port 2b is utilized for introduction or discharge by an operator and a port 2c is utilized for transportation within a process. In this manner, interference among different transportation systems can be prevented. Thus, it is possible to provide a stocker adapted to satisfy needs of each user.
机译:目的:为防止不同运输系统之间的干扰,并提供一种能够满足每个用户需求的储料器,方法是在储料器本体上提供多个供排口,并在矩形框架中提供可旋转的圆柱形储物架。组成:一个储存器主体1是通过将一个圆柱形的储存架4可旋转地安装在一个矩形框架3中而构成的。该储存器主体是以单元形式构建的,以便可以将用于引入和排出晶片的搬运器机构5附接到该储存器主体的任何所需表面上。放养架4由多个盘形板4a构成,该盘形板4a在其中心具有孔6,并且彼此叠置,从而它们整体上被成形为圆柱体。引入和排出口2a用于过程之间的运输,端口2b用于由操作员引入或排出,端口2c用于过程内的运输。以这种方式,可以防止不同运输系统之间的干扰。因此,可以提供适于满足每个用户的需求的储料器。

著录项

  • 公开/公告号KR960013626B1

    专利类型

  • 公开/公告日1996-10-10

    原文格式PDF

  • 申请/专利权人 TOKYO ELECTRON KK.;

    申请/专利号KR19880008596

  • 发明设计人 ASAKAWA TERUO;

    申请日1988-07-11

  • 分类号H01L21/68;

  • 国家 KR

  • 入库时间 2022-08-22 03:45:13

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号