Step-by-step growth method of single crystal diamond film

摘要

The present invention relates to a step-by-step growth method for synthesizing a single crystal diamond film having a minimum mismatch between particles or a substrate and a surface roughness on a Si single crystal substrate. According to the method of the present invention, the surface growth is minimized by selectively growing the aggregate structure having the same lattice direction as the Si substrate in the first step, and controlling the synthesis conditions step by step to enable the two-dimensional growth of the diamond in the second step. The prepared single crystal diamond film can be synthesized.