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Process for the production of components from superconducting oxide ceramic materials.

机译:由超导氧化物陶瓷材料生产部件的方法。

摘要

A layer (2) of a material of substantially the same chemical composition as a known high Tc ceramic superconductor is formed on a substrate (1) by sputtering and is selectively irradiated with a laser beam (3) so as to define irradiated (4) and non-irradiated (5) regions. The sputtered layer (2) is disordered and has many lattice defects and imperfections and thus is basically non-superconducting, but by irradiation with a laser beam (3) the sputtered layer (2) is melted and then recrystallizes into an ordered and superconducting material. In another embodiment, the sputtered layer is already superconducting and is changed into a non-superconducting material by irradiation with a laser beam, said irradiation being carried out at a relatively low temperature in order to rapidly cool the irradiated portion and convert it into a disordered, non-superconducting state. A puferred substrate is chosen from the group containing YSZ, yttria and zirconia, which have thermal expansion coefficients substantially matching that of superconducting oxide materials.
机译:通过溅射在基板(1)上形成化学成分与已知的高Tc陶瓷超导体基本相同的材料的层(2),并选择性地照射激光束(3)以定义被照射的(4)和非辐照(5)区域。溅射层(2)是无序的并且具有许多晶格缺陷和缺陷,因此基本上是非超导的,但是通过用激光束(3)照射,溅射层(2)熔化然后再结晶为有序的超导材料。 。在另一个实施方案中,溅射层已经是超导的,并且通过用激光束辐照而变成非超导材料,所述辐照是在相对较低的温度下进行的,以便迅速冷却被辐照的部分并将其转化为无序的。 ,非超导状态。从包含YSZ,氧化钇和氧化锆的组中选择抛光的衬底,其热膨胀系数基本上与超导氧化物材料的热膨胀系数匹配。

著录项

  • 公开/公告号DE3854626T2

    专利类型

  • 公开/公告日1996-07-04

    原文格式PDF

  • 申请/专利权人 SEMICONDUCTOR ENERGY LAB JP;

    申请/专利号DE19883854626T

  • 发明设计人 YAMAZAKI SHUNPEI JP;

    申请日1988-03-14

  • 分类号H01L39/24;H01L39/12;

  • 国家 DE

  • 入库时间 2022-08-22 03:42:34

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