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Method and arrangement for charge carrier profiling in semiconductor structure by means of AFM scanning
Method and arrangement for charge carrier profiling in semiconductor structure by means of AFM scanning
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机译:通过原子力显微镜扫描在半导体结构中进行载流子轮廓分析的方法和装置
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摘要
In the atomic force microscopy method, the scanning system modified to provide high-frequency control is set into oscillation by electrical pulses having an amplitude that is adjustable and variable within a wide range. The pulses are so short that contact between the scanning tip and the sample is avoided. The pulse amplitude and/or form are varied in order to generate space charge zones in the semiconductor structures that are shaped differently within wide limits.
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