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Optimization of Easy Atomic Force Microscope (ezAFM) Controls for Semiconductor Nanostructure Profiling.

机译：半导体纳米结构分析的简易原子力显微镜（ezaFm）控制的优化。

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作者
Bisoi, S.; Das, N.;
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年度 2017
页码 1-16
总页数 16
原文格式 PDF
正文语种 eng
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关键词
Atomic force microscope; Semiconductor nanostructures;

机译：原子力显微镜;半导体纳米结构;

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专利

1. Machining Complex Three-Dimensional Nanostructures With an Atomic Force Microscope Through the Frequency Control of the Tip Reciprocating Motions [J] . Geng Yanquan, Yan Yongda, Brousseau Emmanuel, Journal of manufacturing science and engineering: Transactions of the ASME . 2016,第12期

机译：通过尖端往复运动的频率控制用原子力显微镜加工复杂的三维纳米结构
2. Detecting Topography of WO3 Semiconductor by Atomic Force Microscope (AFM) and Scanning Tunneling Microscope (STM) [J] . Anwar QA Nano science & nano technology: an Indian journal . 2018,第2期

机译：通过原子力显微镜（AFM）和扫描隧道显微镜（STM）检测WO3半导体的形貌
3. Detecting Topography of W03 Semiconductor by Atomic Force Microscope (AFM) and Scanning Tunneling Microscope (STM) [J] . Nano science & nano technology: an Indian journal . 2018,第1a2期

机译：用原子力显微镜（AFM）和扫描隧穿显微镜检测WO3半导体的形貌（STM）
4. In-Line Critical Dimension and Sidewall Roughness Metrology Study for Compound Nanostructure Process Control by In-Line 3D Atomic Force Microscope [C] . T. G. Kim, H. Y. Ryu, A. Jo, PRiME Joint International Meeting of the Electrochemical Society, the Electrochemical Society of Japan, and the Korean Electrochemical Society . 2016

机译：在线三维原子力显微镜中复合纳米结构控制的在线关键尺寸和侧壁粗糙度计量研究
5. Use of an atomic force microscope for the characterization of nanostructures and for lithography. [D] . Teniere, Antoine. 2008

机译：原子力显微镜用于表征纳米结构和光刻的用途。
6. Optimizing 1-μs-Resolution Single-MoleculeForce Spectroscopy on a Commercial Atomic Force Microscope [O] . Devin T. Edwards, Jaevyn K. Faulk, Aric W. Sanders, -1

机译：优化1μs分辨率单分子商业原子力显微镜上的力谱
7. High-sensitivity noncontact atomic force microscope/scanning tunneling microscope (nc AFM/STM) operating at subangstrom oscillation amplitudes for atomic resolution imaging and force spectroscopy [O] . Oral, A., Grimble, R. A., Ozer, H. O., 2003

机译：高灵敏度非接触原子力显微镜/扫描隧道显微镜（nc AFM / STM），工作于亚埃振荡振幅，用于原子分辨率成像和力谱

Optimization of Easy Atomic Force Microscope (ezAFM) Controls for Semiconductor Nanostructure Profiling.

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