SURFACE-PROPERTY EVALUATING DEVICE AND METHOD FOR CORRECTING SAMPLE POSITION OF SURFACE-PROPERTY EVALUATING DEVICE

摘要

PROBLEM TO BE SOLVED: To set the position of an indentation of a sample automatically at the intended position in the field of view of an observing means without using a large-scale fine adjustment device. ;SOLUTION: As the first pushing test, a sliding stage 11 is actuated, and a horizontal stage 10 is located at the pushing position directly beneath an indenter 2. An indentation is formed in the surface of a sample 1 by the indenter 2. The horizontal stage 10 is located at the observing position directly beneath a microscope 4. When the central axis of the visual field of the microscope and the position of the indentation are deviated, the horizontal stage 10 is operated with the microscope 4 being observed so that both positions agree. The amount of the correcting movement based on the amount of this movement is stored in a memory 8. In the pushing tests at the second time and later, the horizontal stage 10 is operated when the horizontal stage 10 is located at the pushing position, and the sample 1 is moved by the negative amount of the above described amount of the correcting movement. After the formation of the indentation, the horizontal stage 10 is operated when the horizontal stage 10 is returned to the observing position, and the sample 1 is moved by the positive value of the above described amount of the correcting movement.;COPYRIGHT: (C)1997,JPO