SEMICONDUCTOR COATING FILM FORMING EQUIPMENT, AND THIN FILM SOLAR CELL AND FORMING METHOD OF THIN FILM SOLAR CELL

摘要

PURPOSE: To obtain an equipment capable of forming a thin film solar cell wherein optical deterioration is little while high initial conversion efficiency is maintained, by a method wherein a substrate is carried in a specified direction in a glow discharge space, and a substrate heating means heats the substrate at different temperatures in the carrying direction of the substrate. ;CONSTITUTION: The equipment consists of reaction chambers 502-504, exhausting means 523-525 for vacuumizing the reaction chambers 502-504, gas introducing means 526-528 for introducing gas into the reaction chamber 502-504, glow discharge generating means 515-517 installed in the reaction chambers 502-504, and substrate heating means 510-514 installed in the reaction chambers 502-504. A substrate 401 is carried in a specified direction in a glow discharge space formed by the glow discharge generating means 515-517. The substrate heating means 510-514 heats the substrate 401 at different temperatures in the carrying direction of the substrate 401. For example, a flexible substrate 401 is carried by a roll to roll system.;COPYRIGHT: (C)1996,JPO