PRODUCTION OF SUPERLATTICE MULTI-LAYERED FILM COMPRISING METAL AND OXIDE

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a superlattice multi-layered film, capable of efficiently producing the superlattice multi-layer film good in crystallinity, high in quality and useful as a new functional material by the epitaxial growth treatment of an intermetallic compound and an oxide as raw materials by a vacuum film-forming method. ;SOLUTION: This method for producing the superlattice multi-layered film comprising the metal and the oxide comprises subjecting raw materials comprising the intermetallic compound having a face-centered tetragonal structure or face-centered cubic structure and the oxide having a sodium chloride type cubic structure and having a lattice constant difference of 2% therebetween to an epitaxial growth treatment by a vacuum film-forming method to alternately laminate the intermetallic compound and the oxide to each other into at least two layers.;COPYRIGHT: (C)1997,JPO