SEED CRYSTAL FOR LIFTING SINGLE CRYSTAL AND LIFTING OF SINGLE CRYSTAL WITH THE SEED CRYSTAL

摘要

PROBLEM TO BE SOLVED: To obtain a seed crystal enabling the saving of a necking process on the growth of a single crystal without rearranging the seed crystal, by forming the seed crystal comprising a columnar body portion and a conical tip portion. ;SOLUTION: This seed crystal 15 for lifting a single crystal comprises a columnar body portion 15a having a diameter of 6-30mm and a conical tip portion 15b having a length of 5-100mm. The seed crystal 15 rotated on the same axis as that of a support shaft in the reverse direction at a specified rotation rate and simultaneously attached to a seed chuck is lowered just above a molten liquid 13, and subsequently preliminarily heated for 5-120min to raise the temperature of the tip portion 15b of the seed crystal 15 almost to the temperature of the molten liquid 13. The seed crystal 15 is lowered, until the tip portion 15b of the seed crystal 15 reaches the surface of the molten liquid 13, and the seed crystal 15 is further lowered at a speed of 0.5-2mm/min to dissolve a part of the tip portion of the seed crystal in the molten liquid 13. The seed crystal 15 is controlled at the temperature of the molten liquid 13, lifted to form a shoulder 16a and further lifted to form the main body 16b.;COPYRIGHT: (C)1997,JPO