DEVICE FOR DEPOSITING DIAMOND FILM AND THE DEPOSITION OF THE DIAMOND FILM

摘要

PROBLEM TO BE SOLVED: To provide a technology for depositing a diamond film, capable of producing the synthetic diamond film in high efficiency and inexpensively by enhancing the utilization efficiency of hydrogen, and to provide a device therefor. ;SOLUTION: This method for depositing a diamond film comprises supplying an atmosphere containing hydrogen gas and a hydrocarbon gas, dissociating the hydrogen gas in the atmosphere by the discharge of a dielectric barrier to produce atomic hydrogen, providing a deposition surface in the atmosphere, and utilizing the atomic hydrogen to deposit the diamond on the deposition surface from the hydrocarbon gas. Preferably, the atomic hydrogen is transported from the dissociation position to the deposition surface by the diffusion of molecules, and the process for dissociating the hydrogen gas comprises dissociating the hydrogen gas at a place separated from the deposition surface in a distance of 10mm, controlling the gas pressure of the atmosphere to 40Torr, and again dissociating the hydrogen molecules generated by the recombination of the atomic hydrogen, when the hydrogen gas accelerates the deposition of the diamond.;COPYRIGHT: (C)1997,JPO