TACKY FILM FOR HOLDING METALLIC FOIL AND ETCHING OF METALLIC FOIL USING THE SAME

摘要

PROBLEM TO BE SOLVED: To obtain a tacky film for holding a metallic foil capable of firmly holding the metallic foil at the time of carrying out the etching processing and simply peeling without causing damage such as deformation or breakage to the metallic film when peeling after processing and provide a method for etching the metallic foil using the tacky film. ;SOLUTION: This tacky film for holding a metallic foil is obtained by coating a substrate of a plastic film having ≥200kg/mm² tensile elastic modulus at 25°C and ≥50μm thickness with a tacky agent having the adhesive strength regulated to ≥3 times at a higher temperature than the melting point of the tacky agent based on that at a lower temperature than the melting point. Furthermore, the method for etching the metallic foil is to apply the tacky film for holding the metallic foil to the metallic foil at a higher temperature than the melting point of the tacky agent in the tacky film for holding the metallic foil, carrying out the etching processing and then peeling the tacky film for holding the metallic foil at a lower temperature than the melting point of the tacky agent.;COPYRIGHT: (C)1997,JPO