STANDARD GAS FOR ANALYZING TRACE METAL, PREPARING DEVICE AND METHOD FOR STANDARD GAS

摘要

PROBLEM TO BE SOLVED: To provide a standard gas for analyzing metal compound contained in high-purity gas, pure water, or organic solvent by a direct method by containing the vapor of a metal compound having the sublimation pressure at a specific temperature or above and a gas inactive to the metal compound. SOLUTION: This standard gas contains the vapor of an organic metal compound having the sublimation pressure at the temperature 20 deg.C or above, e.g. an organic metal complex, organic metal carbonyl, or organic metal chelate, and a gas inactive to the metal compound, e.g. nitrogen, helium, or hydrogen. A communicating pipe 4 is removed from a cell 2 and a passage 3, a metal compound 12 is inserted into a space 5, and silica wool 13 having air permeability is arranged above it. Joint sections 10, 11 of the communicating pipe 4 are fitted to the connection ports 6, 9 of the cell 2 and the passage 3. A gas inactive to the metal compound 12 is fed from the inflow port 7 of the passage 3. Vapor is generated from the metal compound 12, and it flows into the passage 3 through the silica wool 13 as the aimed standard gas.