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PROCEDURE FOR USING DISK-LIKE STARTING MATERIAL FOR MANUFACTURING OPTOELECTRONIC COMPONENTS WITH GRATINGS OF A VARIABLE GRATING PERIOD
PROCEDURE FOR USING DISK-LIKE STARTING MATERIAL FOR MANUFACTURING OPTOELECTRONIC COMPONENTS WITH GRATINGS OF A VARIABLE GRATING PERIOD
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机译:使用类似盘的起始材料制造具有可变光栅周期的光栅的光电组件的方法
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摘要
1. A procedure for using disk-shaped starting material for manufacturing optoelectronic structural elements with gratings of a variable grating period. 2.1. The solution according to the present invention is used to avoid losses of material by using an optimized arrangement of optoelectronic structural elements on disk-shaped starting material. 2.2. The procedure according to the present invention is based on the fact that variations of nominally identical individual structural element patterns are determined by mathematical rotation and mirror-imaging; in that a unit cell is formed by offsetting the variations of the individual structural element patterns; in that the unit cell is reproduced in the x and in the y directions, until the active surface of the mask, or the whole surface of the disk-shaped starting material is covered continuously. 2.3. The solution according to the present invention is used for manufacturing photonic structural elements based on DFB, DBR grating structures, or grating structures that are axially interrupted several times. 3. Figure 2.
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