首页> 外国专利> PROCEDURE FOR USING DISK-LIKE STARTING MATERIAL FOR MANUFACTURING OPTOELECTRONIC COMPONENTS WITH GRATINGS OF A VARIABLE GRATING PERIOD

PROCEDURE FOR USING DISK-LIKE STARTING MATERIAL FOR MANUFACTURING OPTOELECTRONIC COMPONENTS WITH GRATINGS OF A VARIABLE GRATING PERIOD

机译:使用类似盘的起始材料制造具有可变光栅周期的光栅的光电组件的方法

摘要

1. A procedure for using disk-shaped starting material for manufacturing optoelectronic structural elements with gratings of a variable grating period. 2.1. The solution according to the present invention is used to avoid losses of material by using an optimized arrangement of optoelectronic structural elements on disk-shaped starting material. 2.2. The procedure according to the present invention is based on the fact that variations of nominally identical individual structural element patterns are determined by mathematical rotation and mirror-imaging; in that a unit cell is formed by offsetting the variations of the individual structural element patterns; in that the unit cell is reproduced in the x and in the y directions, until the active surface of the mask, or the whole surface of the disk-shaped starting material is covered continuously. 2.3. The solution according to the present invention is used for manufacturing photonic structural elements based on DFB, DBR grating structures, or grating structures that are axially interrupted several times. 3. Figure 2.
机译:1.一种使用盘状起始材料制造具有可变光栅周期的光栅的光电结构元件的方法。 2.1。根据本发明的解决方案通过在盘形的起始材料上使用光电结构元件的优化布置来避免材料损失。 2.2。根据本发明的程序基于以下事实:名义上相同的单个结构元件图案的变化是通过数学旋转和镜像成像确定的;因此,本发明不限于此。其中,通过抵消各个结构元件图案的变化来形成单位单元。因为在x方向和y方向上复制了晶胞,直到掩模的有效表面或盘状起始材料的整个表面被连续覆盖。 2.3。根据本发明的解决方案用于制造基于DFB,DBR光栅结构或轴向中断多次的光栅结构的光子结构元件。 3.图2。

著录项

  • 公开/公告号CA2177650A1

    专利类型

  • 公开/公告日1996-12-01

    原文格式PDF

  • 申请/专利权人 DEUTSCHE TELEKOM AG;

    申请/专利号CA19962177650

  • 发明设计人 HILLMER HARTMUT;

    申请日1996-05-29

  • 分类号G02B6/13;G02B5/18;G03F1/00;

  • 国家 CA

  • 入库时间 2022-08-22 03:23:39

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