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METHOD FOR OPTIMIZED UTILIZATION OF BASE MATERIAL IN THE MANUFACTURE OF OPTOELECTRONIC COMPONENTS WITH VARIABLE-PERIOD GRATINGS
METHOD FOR OPTIMIZED UTILIZATION OF BASE MATERIAL IN THE MANUFACTURE OF OPTOELECTRONIC COMPONENTS WITH VARIABLE-PERIOD GRATINGS
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机译:具有可变周期光栅的光电元件制造中基础材料的优化利用方法
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摘要
] Disclosed is a method for the optimum utilization of disk-shaped base material in the manufacture of optoelectronic components with variable-period grating. The method helps avoid material losses by arranging optoelectronic components on a disk-shaped base material in an optimum manner and is based on obtaining variants of nominally identical individual component patterns by mathematical rotation and mirroring, forming a unit cell through shifting of the individual component pattern variants, and reproducing the unit cell in the x and y directions until the active surface of the mask or the entire surface of the disk-shaped base material is tightly covered. The method may be used for the manufacture of photonic components based on DFB, DBR, or sampled grating structures.
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