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Device for removing oxide scale on the surface of silicon thin-film insulation coating roll

机译:硅薄膜绝缘涂膜辊表面氧化皮去除装置

摘要

This high case is an insulating coating device for coating on the surface of silicon sheet. The surface of the insulating coating in the insulating coating device is more delicate than imagined, which can effectively remove the scale of acidification, greatly improve the cleanliness of the insulating coating solution of the silicon sheet, and the device for removing the oxidation of the surface.This case is.In the insulating solution storage groupContact the surface of the insulating coating dragon and scrape the acidization degree to the lower part of yesterday's puffy part of the scrubber,In the above wapper deployment, a stop oxidation scale magnet plate is installed,The surface of the magnet is provided with a plastic covered oxidation scale with magnetic penetration and the interior of the last insulating solution storage group,A hole is formed in the center to prevent the floating solution from flowing in the insulating solution,To prevent the movement of the foreign matters in the waper square, and to provide an acidizing device on the surface of the silicon sheet cutting roller including the flow preventing plate.
机译:这种高壳体是用于在硅片的表面上进行涂覆的绝缘涂覆装置。绝缘涂层装置中绝缘涂层的表面比想象的要细,可以有效去除酸化的水垢,大大提高硅片绝缘涂层溶液的清洁度,并且可以去除表面的氧化。这种情况是。在绝缘溶液存储组中,与绝缘涂层龙的表面接触并将酸化度刮到洗涤塔的昨天蓬松部分的下部,在上述包装器中,安装了一块停止氧化皮磁铁板,磁铁的表面上有一层覆盖有塑料的氧化皮,该氧化皮具有磁性渗透作用,并且在最后一个绝缘溶液存储组的内部,中央形成了一个孔,以防止漂浮液在绝缘溶液中流动,以防止运动在晶片方块中去除异物,并在硅片切割表面上提供酸化装置包括防流板的滚轮。

著录项

  • 公开/公告号KR970027274U

    专利类型

  • 公开/公告日1997-07-24

    原文格式PDF

  • 申请/专利权人 대표이사 김종진;

    申请/专利号KR19950046856U

  • 发明设计人 박순복;

    申请日1995-12-23

  • 分类号B05C1/08;

  • 国家 KR

  • 入库时间 2022-08-22 03:17:35

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