A transmission mask for a charged particle beam exposure apparatus and an exposure apparatus using a transmission mask

摘要

A transmission mask for a charged particle beam exposure apparatus of the present invention comprises: a mask substrate having a plurality of openings provided in a matrix form and having a pair of deflection electrodes provided in each opening on one surface; And a beam blocking layer provided on the other surface of the mask substrate and having a transmittance of a beam larger than that of the mask substrate. The transmissive mask is installed in the apparatus to direct the beam gun to direct the beam gun to prevent an increase in temperature due to the beam irradiation.