TRANSMISSIVE MASK FOR CHARGED PARTICLE BEAM EXPOSURE APPARATUS, AND AN EXPOSURE APPARATUS USING SUCH A TRANSMISSION MASK

摘要

A transmission mask for a charged particle beam exposure apparatus of the present invention comprises: a mask substrate having a plurality of openings provided in the form of a matrix and having a pair of deflection electrodes provided in each opening on one surface; And a beam blocking layer provided on another surface of the mask substrate and having a transmittance of a beam larger than that of the mask substrate. The transmission mask is installed in the apparatus to direct the beam blocking layer to a beam gun to prevent an increase in temperature due to the beam irradiation.