Force sensor esp. pressure sensor with at least one measuring diaphragm

摘要

The force sensor has at least one measuring diaphragm, which experiences a deflection according to the force to be detected. The diaphragm (16) has at least two evaluation units (20,24) allocated, which determine the deflection independently of each other. The diaphragm has allocated to it a capacitive and a piezoelectric evaluation unit (20,24). The measurement signals delivered by the evaluation units, enable the force sensor (10) to be monitored for reliability. The force sensor can have several diaphragms. Each diaphragm is allocated at least two evaluation units, working independently of each other.