BASKET FOR WAFERS, ESPECIALLY OF SEMICONDUCTOR SILICON

摘要

PURPOSE:To eliminate erroneous operation of an automatic machine by forming the end face of end wall on the side, provided with a bar member having an index protrusion on the surface, into an inclining surface projecting gradually upward thereby facilitating the setting of a wafer in the container and the removal of the wafer therefrom. CONSTITUTION:The wafer basket 3 comprises a pair of opposing side walls 31 and formed integrally into a rectangular frame through a pair of end walls 32 coupling the side walls 31. A plurality of resilient ribs 1 for carrying a large number of wafers through a constant interval are planted on the inner wall of each side wall 31 thus forming a wafer containing groove 2 between respective resilient ribs 1. One end wall 32 is provided horizontally with a bar member 31 having index protrusions 30 and the end face of the end wall 32 is formed, on the side provided with the bar member 31, into an inclining face projecting gradually upward. This structure can eliminate erroneous operation of an automatic machine and a wafer ran be set quickly and easily in safety in a wafer container through a simple work.