Semiconductor MIS field effect transistor with semi-amorphous semiconductor material

摘要

A semiconductor device which has a non-single crystal semiconductor layer formed on a substrate and in which the non-single crystal semiconductor layer is composed of a first semiconductor region formed primarily of non-single crystal semiconductor and a second semi- conductor region formed primarily of semi-amorphous semiconductor. The second semi- conductor region has a higher degree of conductivity than the first semiconductor region so that a semi-conductor element may be formed.