METHOD OF AVOIDING DESIGN COMPETITION OF MUTUAL CONNECTION IN PHASE EDGE PHASE SHIFT DESIGN

摘要

PROBLEM TO BE SOLVED: To detect automatically and avoid the phase competition which is most frequently encountered in phase edge phase shift mask(PSM) which is used in the manufacturing process of a VISI(very large scale integrated) circuit. SOLUTION: A process which is implemented as an automatic CAD(computer aided design) routine by which one of the legs of 3-directional mutual connections is detected and its width is widened to avoid the phase competition is provided. After the design competition is first detected and then resolved by using the CAD and design rule checking technique, the phase shift mask design which requires a very long time is actually implemented. Before the design rule checking or as a part of the design rule checking, the original circuit design is processed and the processes which are implemented before the delivery to the mask layout and mask data producing group can be verified.