LASER BEAM MACHINE, CIRCULARITY MEASURING METHOD USING THIS MACHINE AND DRIVING SYSTEM INSPECTING METHOD

摘要

PROBLEM TO BE SOLVED: To correctly measure circularity without transferring the work of machined hole to circularity measuring device, moreover to increase the machining speed up to the required maximum while confirming the measured circularity and also to inspect the driving system. SOLUTION: In this laser beam machine, the laser beam machining head 17 executing laser beam machining to the work W and the image pickup device unit 21 picking up the hole WH of the work W machined with the laser beam are provided in the Y axis carriage 15 freely transferable in the Y axial direction, the image incorporating camera 25, a ring illumination 35 and a work presser 41 are provided in the image pickup device unit 21, the image processing device processing the image picked up with the image incorporating camera 25 is provided, the processor obtaining circularity based on data processed with the image processing device is provided, and the ring illumination 35 and the work presser 41 are integrally provided so as to freely and vertically move.