LIQUID-SAVING LIQUID-SUPPLY NOZZLE USED FOR WET TREATMENT INCLUDING CLEANING, ETCHING, DEVELOPMENT, STRIPPING, ETC., AS WELL AS APPARATUS AND METHOD FOR WET TREATMENT

摘要

PROBLEM TO BE SOLVED: To provide a water-saving wet-treatment-l-quid supply nozzle, a wet-treatment apparatus and a wet-treatment method in which the consumption amount of a wet- treatment liquid can be reduced to 1/10 or lower as compared with that in conventional case and which can obtain a higher cleanliness degree as compared with that in conventional cases. ;SOLUTION: A nozzle constitution body 50 which is formed in such a way that an introduction passage 10 which comprises an introduction port 7 and a discharge passage 12 which comprises a discharge port 15 are formed, that the introduction passage 10 and the discharge passage 12 are crossed at their ends on the other side so as to form a crossing part 14 and that an opening part 6 which is opened toward an object 1 to be treated is formed at the crossing part 14 and a pressure control means 13 by which the difference between the pressure of a wet-treatment liquid coming into contact with the object 1 to be treated and atmospheric pressure is controlled in such a way that the wet-treatment liquid coming into contact with the object 1, to be treated, via the opening part 6 does not flow to the outside of the discharge passage 12 after a wet treatment are provided on the side of at least the discharge passage 12.;COPYRIGHT: (C)1998,JPO