SYNCHROTRON RADIATION INTENSITY MEASURING INSTRUMENT AND X-RAY EXPOSURE DEVICE EQUIPPED WITH THE INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To provide an X-ray exposure device in which the intensity of synchrotron radiation can be measured with high precision at a high speed, and highly precise exposure control can be attained based on the measured information. ;SOLUTION: X-ray detectors 8a and 8b are arrayed on stages 2 and 6 following-up the movement of a seat beam 9 emitted from a synchrotron ring 1 which is made movable to a direction having the intensity distribution of the seat beam 9, and the intensity of synchrotron radiation is calculated with high precision based on the output signals of the X-ray detectors 8a and 8b by using an intensity calculator 13 which preliminarily holds a relation between the output signal of the X-ray detector or the like and the synchrotron radiation light intensity as a data table. Then, the driving speed or driving pattern of a shutter 3 is controlled through a shutter controller 14 based on the calculation result so that the exposure time can be controlled and the exposure on a mask 4 and a wafer 5 can be made uniform.;COPYRIGHT: (C)1998,JPO