METHOD FOR EVALUATING CHARACTERISTIC OF SUBSTANCE BASED ON PROGRAMMED TEMPERATURE DESORPTION SPECTRAL METHOD AND METHOD FOR FORMING SEMICONDUCTOR INSULATING FILM USING THE SAME

摘要

PROBLEM TO BE SOLVED: To quickly and easily evaluate a structural characteristic of a substance by forming models of a diffusion process from the interior of the substance of chemical species to the vicinity of a surface and a surface desorption process, e.g. stripping, accumulation, gas phase emission, etc., and combining the models with a programmed temperature desorption spectrum. ;SOLUTION: Models of a diffusion process and a surface desorption process are represented respectively by formulae I and II wherein T is a temperature, (t) is a time, (x) is a distance in a thicknesswise direction, (c) is a concentration of chemical species, D is a diffusion coefficient, D_o,_i is a prediffusion exponential term, E_d,_i is a diffusion activation energy, kB is a Boltzmann factor, (k) is a desorption reaction speed constant, c_s is a surface accumulation amount, (n) is a desorption reaction degree, f_j is a surface coverage rate, A_o,_j is a predesorption exponential term, and E_a,_j is a desorption activation energy. A sample 11 is heated by a heater 14. The temperature T obtained by a temperature control device 16 and the amount of chemical species in a generated gas which is detected by a quadruple mass spectrometer 21 are stored as an actually measured programmed temperature desorption spectrum in a memory device 33. A calculator 34 carries out fitting with the use of the spectrum according to the method of least squares, determines each parameter of the formulae I, II and displays at a display device 32.;COPYRIGHT: (C)1998,JPO