PROBLEM TO BE SOLVED: To compare accurate peak diagrams with each other by respectively finding inclined lines of peak lines to a reference sample and a test sample, and comparing the respective inclined lines with each other. ;SOLUTION: A reference sample 1, a threshold value sample 11 and a test sample 17 are respectively scanned and analyzed by a scanner 7, and respective peak lines are found, and respective inclined lines are calculated by a computer 9. An inclined line from the test sample 17 is compared with an inclined line from the reference sample 1, and mutually corresponding vibrations are transmitted to a purser 25 as a data group, and are displayed on an image screen 26 as an inspection result test, and are outputted as a record 28 by a printer 27. In this case, vibration of the test sample 17 not more than a threshold value amplitude calculated and confirmed from the threshold valve sample 11, is ignored as unconsiderable. A sign or heading characters 29, 30 and 31 are marked on the reference sample 1, the threshold value sample 11 and the test sample 17, and these are also read by the scanner, and are included in the data group, and a correspondence is improved. In this way, inaccuracy can be prevented by comparing peak diagrams with each other.;COPYRIGHT: (C)1998,JPO
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