METHOD FOR EVALUATING PROPERTY OF FINE PARTICLE USING FINE PARTICLE COMPONENT-ANALYZING APPARATUS

摘要

PROBLEM TO BE SOLVED: To evaluate properties of a fine particle or a set of fine particles by operating a composition ratio of a plurality of elements from a light emission coincidence and a light emission intensity of elements included in the fine particles and obtaining a correlation. ;SOLUTION: Solid fine particles to be measured and adhering to a filter 2 disposed in a disperser 1 are sucked by an aspirator 3 and supplied to a reaction tube 4. When microwaves of 2.45GHz frequency are introduced into a cavity 14 from a microwave source 13, approximately 4000K plasma is generated in the reaction tube 4, and the solid fine particles are atomized and ionized in the plasma. The solid fine particles emit light when falling into a ground state. The spectral emitted light is taken out in an axial direction from the reaction tube 4, condensed at 18 via an optical window 17 and guided through a slit 19 to a plurality of spectroscopes 20b adapted to respective wavelengths of elements. The light is split at the spectroscopes. A CPU 20a counts an emission intensity of elements emitting light simultaneously and an emission number of times, operates a composition ratio of the plurality of elements and evaluates a state of the fine particles from a correlation.;COPYRIGHT: (C)1998,JPO