Filler fine particle dispersibility evaluation apparatus and filler fine particle dispersibility evaluation method

摘要

PROBLEM TO BE SOLVED: To enable easy and quick acquisition of an accurate three dimensional state of dispersion, in submicron units, of filler microparticles in a multilayer resin film formed on a cylindrical substrate as it is in a device form.SOLUTION: A filler microparticle dispersibility evaluation apparatus for evaluating dispersibility of filler microparticles dispersed in a cylindrical film sample 40 by irradiating the cylindrical film sample 40 with laser light and measuring Rayleigh light that includes interfacial reflected light from the film sample and weak scattered light from the filler microparticles, comprises: a support jig 41 which supports the cylindrical sample such that the central axis thereof is horizontal; a support jig drive unit 42 which drives the support jig 41 to allow movement thereof in a direction perpendicular to the laser light and perpendicular to the axis of the cylindrical sample (radial direction in Fig. 3); drive control means which drive-controls the support jig drive unit; and an observation CCD 43 which is an image sensor for surface observation.