CALIBRATION SAMPLE, PROBE POSITION CORRECTING APPARATUS USING THE CALIBRATION SAMPLE, FINE WIRING INSPECTING APPARATUS AND PROBE POSITION CORRECTING METHOD

摘要

PROBLEM TO BE SOLVED: To measure a shift in position when a probe to be in contact with a fine wire has been replaced in a short time. ;SOLUTION: The calibration sample comprises position detection blocks PO to P7 for detecting an X-direction position and position detection blocks Q0 to Q7 for detecting a Y-direction position. The position detection blocks P0 to P7 for detecting the X-direction position are formed with position identification patterns of respectively different uneven shapes on a surface. In addition, the position detection blocks Q0 to Q7 for detecting the Y-direction position are similarly formed with position identification patterns of respectively different uneven shapes. Therefore after a probe is brought into contact with any one of the blocks P0 to P7 for detecting the X-direction position, the probe can be brought into contact with any one of the blocks Q0 to Q7 for detecting the Y-direction position. Thus the calibration sample can be used to correct both a shift in the center of a field of view of an optic microscope and a shift of the probe.;COPYRIGHT: (C)1998,JPO