TITANIUM-HAFNIUM ALLOY TARGET MATERIAL FOR VAPOR PHASE COATING

摘要

PROBLEM TO BE SOLVED: To obtain a long life Ti-Hf alloy target material for vapor phase coating, capable of performing efficient film formation with stable electric discharge characteristic, by specifying density and removing the defect penetrating through the target from the surface to the rear surface. ;SOLUTION: The target material for vapor phase coating, composed of Ti-Hf alloy, has 99.0-100% relative density and is free from the defect penetrating through the target from the surface to the rear surface. It is preferable that this material has a composition represented by Ti_1-xHf_x (where 0x≤0.8 is satisfied) or Ti_1-x-yH_xAl_y (where 0x≤0.8, 0y≤0.8, and 0x+y1 are satisfied). Moreover, as to the contents of its impurities, it is preferable that O, H, and Cl contents are controlled to ≤0.3% by mass, ≤0.05%, and ≤0.2%, respectively, and further Cu and Mg contents are controlled to ≤0.05% and ≤0.03%, respectively, and further Fe and Mn contents are controlled to ≤0.5% and ≤0.5%, respectively. It is also preferable to regulate the radius of pores in this material to 0.3mm. This material is suitable for use in vapor phase coating, such as arc ion plating and sputtering, and hydrostatic hot pressing is applicable.;COPYRIGHT: (C)1998,JPO