COMPOSITION FOR FORMING POSITIVE METAL SULFIDE THIN FILM PATTERN AND METHOD FOR FORMING POSITIVE METAL SULFIDE THIN FILM PATTERN

摘要

PROBLEM TO BE SOLVED: To form a good positive metal sulfide thin film pattern by a sol-gel method by incorporating a stabilizer generating agent forming a metal alkoxide stabilizer by photoirradiation. ;SOLUTION: A metal alkoxide is the raw material for a metal sulfide, and a lower alkoxide such as the ethoxide, propoxide, isopropoxide, butoxide and isobutoxide of the metal of the metal sulfide to be formed is appropriately used. The metal alkoxide and a stabilizer generating agent forming a metal alkoxide stabilizer by photoirradiation are incorporated into the composition for forming a positive metal sulfide thin film pattern. As a result, only the light-irradiated part is dissolved off when the composition is developed after photoirradiation, the unirradiated part is left, and a positive metal sulfide thin film pattern is formed.;COPYRIGHT: (C)1997,JPO