SUPPORTING DEVICE FOR SEMICONDUCTOR DEVICE, CARRIER FOR TESTING SEMICONDUCTOR DEVICE, FIXING METHOD FOR SEMICONDUCTOR DEVICE, METHOD FOR SEPARATING SEMICONDUCTOR DEVICE FROM SUPPORTING DEVICE, AND METHOD FOR MOUNTING SEMICONDUCTOR DEVICE ON CARRIER FOR TESTING

摘要

PROBLEM TO BE SOLVED: To prevent the coming-off of a semiconductor device by the vibration or the like during the conveying, by installing a wiring to be brought into contact with an electrode of a semiconductor device, on a base, and pressing and fixing a supporting plate of the semiconductor device to the base by the magnetic force of a magnet and a magnetic member. ;SOLUTION: A recessed part 42 in which a rubber elastic body 43 is buried, is installed on an upper face of a wiring board for testing 41, a contact terminal 45 is installed on the inner edge parts of plural patterns for testing 44, and plural magnetic members 47 are buried around the elastic body 43. A recessed part 52 for supporting a bare chip 40 is formed in opposition to the elastic body 43 on a supporting base 51, and a permanent magnet 54 is installed in opposition to the magnetic member 47. A handling head 50 is moved for positioning the supporting base 51 in opposition to an upper part of the wiring board 41, the position is adjusted by a position recognizing camera 55, an image processing unit 56 and a driving mechanism 37, and the electrode 40a of the bare chip 40 and the contact terminal 45 are corresponded to each other by 1:1. The handling head 50 is lowered, so that the magnet and the magnetic member 47 are attracted, and strongly fixed, thereby, preventing the dislocation caused by the vibration or the like.;COPYRIGHT: (C)1998,JPO