Oxygen concentration control manner null of Si molten liquid for monocrystal pulling up

摘要

PURPOSE: To maintain the concn. of oxygen in molten Si at a high level by adding Sb and to pull an Sb doped Si single crystal having a high concn. of oxygen from the molten Si. ;CONSTITUTION: The concn. of oxygen in molten Si is controlled by adding ≥1.3 atomic % Sb to the molten Si. The concn. of Sb in the molten Si is regulated by comparing the concn. of Sb measured with a weight sensor to the set concn. of Sb corresponding to the objective concn. of oxygen and adding or evaporating Sb in accordance with the difference.;COPYRIGHT: (C)1994,JPO