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OPTICAL STRAIN SENSOR AND METHOD FOR THE MEASUREMENT OF MICRODEFORMATIONS

机译:光学应变传感器及测量微形变的方法

摘要

The present invention is concerned with an optical strain sensor for measuring microdeformations of a surface with a resolution of at least 0.2 microns. The sensor comprises at least one camera for taking photographs of areas of the surface, the photographs being separated by a known fixed distance from one another before and after deformation has occured. Templates are selected on the photographs taken before deformation, relocalized on photographs taken after deformation of the surface, and the deformation is derived from the computation of the difference in distances between the templates before and after deformation has occured.
机译:本发明涉及一种光学应变传感器,其用于以至少0.2微米的分辨率测量表面的微变形。该传感器包括至少一个用于拍摄表面区域的照片的照相机,这些照片在发生变形之前和之后以已知的固定距离彼此分开。在变形之前拍摄的照片上选择模板,将其重新定位在表面变形之后拍摄的照片上,并且变形是通过计算发生变形前后的模板之间的距离差得出的。

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