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Optical strain sensor for the measurement of microdeformations of surfaces

机译:光学应变传感器,用于测量表面的微变形

摘要

An optical strain sensor for measuring microdeformations of a surface with a resolution of at least 0.2 microns. The sensor comprises at least one camera for taking photographs of areas of the surface, the photographs being separated by a known fixed distance from one another before deformation has occurred. Templates are selected on the photographs taken before deformation, relocalized on photographs taken after deformation of the surface, and the deformation is derived from the computation of the difference in distances between the templates before and after deformation has occurred.
机译:一种用于测量表面微变形的光学应变传感器,分辨率至少为0.2微米。该传感器包括至少一个用于拍摄表面区域的照片的照相机,这些照片在发生变形之前彼此隔开已知的固定距离。在变形之前拍摄的照片上选择模板,将其重新定位在表面变形之后拍摄的照片上,并且变形是通过计算发生变形前后的模板之间的距离差得出的。

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