Ruption-resistant electrostatic chuck and method of making same

摘要

A rupture-resistant electrostatic chuck 20 is described. The chuck 20 includes at least one electrode 25 and a composite insulator 30 covering the electrode. Wherein the composite insulator comprises a substrate material (50) having a conditioning surface (50) capable of harmonizing the substrate (35) under application of an electrostatic force generated by the electrodes to prevent leakage of heat transfer fluid fixed between the substrate . A hard rupture resistive layer, such as a fibrous layer or an aromatic polyimide layer, is positioned below the retaining surface 50 and has sufficient strength to increase the rupture resistance of the composite insulator.