Method for manufacturing a surface acoustic wave filter using a three-layer thin film of aluminum nitride (AlN) / hydrogenated aluminum nitride (AlN: H) / aluminum nitride (AlN)

摘要

The present invention relates to a method of manufacturing a surface acoustic wave filter using an aluminum nitride (AlN) thin film and a surface acoustic wave filter manufactured thereby. More particularly, the present invention relates to an aluminum nitride (AlN: H) thin film formed by depositing aluminum nitride (AlN) on both sides in order to prevent blistering by protecting the hydrogenated aluminum nitride (AlN: A method for manufacturing a surface acoustic wave filter using triple layered films of AlN / hydrogenated aluminum nitride (AlN: H) / aluminum nitride (AlN) and a surface acoustic wave filter fabricated thereby. An elastic surface using a three-layer thin film of aluminum nitride (AlN) / hydrogenated aluminum nitride (AlN: H) / aluminum nitride (AlN) as a piezoelectric material and a manufacturing method of the filter are easy and economical, A surface acoustic wave filter having a large electromechanical coupling coefficient is manufactured.