Manufacturing line analysis method and manufacturing line analysis device

摘要

A manufacturing line analyzing method and a manufacturing line analyzing apparatus capable of promptly coping with the causes of non-standard products are obtained.;The data of the measurement results obtained from the devices A1 to A8 are stored in the databases C1 to C8, respectively. Every time new data is stored in the databases C1 to C8, the database monitoring computer E1 searches the related data among the data stored in the databases C1 to C8 and stores it in the failure analysis database D3. The data analyzer D0 displays data stored in the failure analysis database D3 and notifies the operator of the data. Accordingly, even when the product wafer is in the manufacturing line, the operator can determine the cause of the non-standard product and its cause, and can quickly deal with the cause of the non-standard product.